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Focused ion beam technology: implementation in manufacturing platforms and process optimisation

Velkova, Valentina 2011. Focused ion beam technology: implementation in manufacturing platforms and process optimisation. PhD Thesis, Cardiff University.
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Abstract

Process chains are regarded as viable manufacturing platforms for the production of Microand Nano Technology (MNT) enabled products. In particular, by combining several manufacturing technologies, each utilised in its optimal process window, they could benefit from the unique advantages of high-profile research technologies such as the focused ion beam (FIB) machining. The present work concerns the development of process chains and the investigation of pilot cost-effective implementations of the FIB technology in manufacturing platforms forfabrication of serial replication masters.

Item Type: Thesis (PhD)
Status: Unpublished
Schools: Engineering
Subjects: T Technology > TJ Mechanical engineering and machinery
T Technology > TS Manufactures
Uncontrolled Keywords: Manufacturing platforms ; Engineering ; Micro and nano technology ; Process chains ; Focused ion beam machining
Date of First Compliant Deposit: 30 March 2016
Last Modified: 19 Mar 2016 22:16
URI: http://orca.cf.ac.uk/id/eprint/10352

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