Fabrication of micro-lens arrays with moth-eye antireflective nanostructures using thermal imprinting process

Oh, Sang Soon ORCID: https://orcid.org/0000-0003-3093-7016, Choi, Choon-Gi and Kim, Young-Sung 2010. Fabrication of micro-lens arrays with moth-eye antireflective nanostructures using thermal imprinting process. Microelectronic Engineering 87 (11) , pp. 2328-2331. 10.1016/j.mee.2010.03.012

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Abstract

We fabricated micro-lens arrays which have moth-eye antireflective nanostructures on their surfaces using thermal imprinting process and plasma treatment and characterized the morphology of the micro-lens arrays. After a micro-lens array shape was fabricated on a photoresist using photolithography and thermal reflow process, patterns were transferred onto a Ni stamp, and then micro-lens patterns were replicated on a polycarbonate film using thermal imprinting lithography. Using reactive ion etching, we were able to form the moth-eye antireflective nanostructures on the surface of polycarbonate films and polycarbonate micro-lens arrays. The AFM and SEM images of the plasma treated samples clearly show that the moth-eye nanostructures are formed on the surface. By measuring the transmittance spectrum using a UV–visible spectrometer, we also show that the moth-eye structures really act as antireflection coatings.

Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Physics and Astronomy
Publisher:	Elsevier
ISSN:	0167-9317
Date of First Compliant Deposit:	22 January 2018
Date of Acceptance:	17 March 2010
Last Modified:	03 Nov 2022 10:31
URI:	https://orca.cardiff.ac.uk/id/eprint/108340

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