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Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrates

Elgaid, Khaled, McCloy, David A. and Thayne, Iain G. 2003. Micromachined SU8 negative resist for MMIC applications on low resistivity CMOS substrates. Microelectronic Engineering 67-68 , pp. 417-421. 10.1016/S0167-9317(03)00188-6

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Item Type: Article
Date Type: Publication
Status: Published
Schools: Engineering
Publisher: Elsevier
ISSN: 0167-9317
Last Modified: 15 Mar 2018 14:27
URI: http://orca.cf.ac.uk/id/eprint/109546

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