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Coplanar waveguide transmission lines and high Q inductors on CMOS grade silicon using photoresist and polyimide

Ternent, G., Ferguson, S., Borsosfoldi, Z., Elgaid, Khaled, Lohdi, T., Edgar, D., Wilkinson, C.D.W. and Thayne, I.G. 1999. Coplanar waveguide transmission lines and high Q inductors on CMOS grade silicon using photoresist and polyimide. Electronics letters 35 (22) , pp. 1957-1958. 10.1049/el:19991298

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Abstract

Gold coplanar waveguide (CPW) transmission lines with losses of <0.5 dB/mm at 60 GHz have been produced on CMOS grade silicon substrates using a 15 /spl mu/m thick layer of either photoresist or polyimide. This process, together with an electroplated interconnect technique, has been used to produce spiral inductors on a 2 /spl Omega//cm n-Si substrate with a Q of 15 and L of 1.2 nH at 6 GHz

Item Type: Article
Date Type: Publication
Status: Published
Schools: Engineering
Publisher: Institution of Engineering & Technology
ISSN: 0013-5194
Last Modified: 08 Mar 2018 12:52
URI: http://orca.cf.ac.uk/id/eprint/109551

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