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A simple, space constrained NIRIM type reactor for chemical vapour deposition of diamond

Thomas, Evan, Gines, Laia, Mandal, Soumen, Klemencic, Georgina and Williams, Oliver Aneurin 2018. A simple, space constrained NIRIM type reactor for chemical vapour deposition of diamond. AIP Advances 8 , 035325. 10.1063/1.5009182

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Abstract

In this paper the design of a simple, space constrained chemical vapour deposition reactor for diamond growth is detailed. Based on the design by NIRIM, the reactor is composed of a quartz discharge tube placed within a 2.45 GHz waveguide to create the conditions required for metastable growth of diamond. Utilising largely off-the-shelf components and a modular design, the reactor allows for easy modification, repair, and cleaning between growth runs. The elements of the reactor design are laid out with the CAD files, parts list, and control files made easily available to enable replication. Finally, the quality of nanocrystalline diamond films produced are studied with SEM and Raman spectroscopy, with the observation of clear faceting and a large diamond fraction suggesting the design offers deposition of diamond with minimal complexity.

Item Type: Article
Date Type: Published Online
Status: Published
Schools: Physics and Astronomy
Subjects: Q Science > QC Physics
Publisher: American Institute of Physics
ISSN: 2158-3226
Date of First Compliant Deposit: 27 March 2018
Date of Acceptance: 21 March 2018
Last Modified: 30 Jun 2018 19:51
URI: http://orca.cf.ac.uk/id/eprint/110265

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