Cardiff University | Prifysgol Caerdydd ORCA
Online Research @ Cardiff 
WelshClear Cookie - decide language by browser settings

Interface passivation and trap reduction via hydrogen fluoride for molybdenum disulfide on silicon oxide back-gate transistors

Hu, Yaoqiao, Yip, Pak San, Tang, Chak Wah, Lau, Kei May and Li, Qiang 2018. Interface passivation and trap reduction via hydrogen fluoride for molybdenum disulfide on silicon oxide back-gate transistors. Semiconductor Science and Technology 33 (4) , 045005. 10.1088/1361-6641/aaa224

[img]
Preview
PDF - Published Version
Download (2MB) | Preview

Abstract

Layered semiconductor molybdenum disulfide (MoS2) has recently emerged as a promising material for flexible electronic and optoelectronic devices because of its finite bandgap and high degree of gate control. Here, we report a hydrogen fluoride (HF) passivation technique for improving the carrier mobility and interface quality of chemical vapor deposited monolayer MoS2 on a SiO2/Si substrate. After passivation, the fabricated MoS2 back-gate transistors demonstrate a more than double improvement in average electron mobility, a reduced gate hysteresis gap of 3 V, and a low interface trapped charge density of ~5.8 × 1011 cm−2. The improvements are attributed to the satisfied interface dangling bonds, thus a reduction of interface trap states and trapped charges. Surface x-ray photoelectron spectroscopy analysis and first-principles simulation were performed to verify the HF passivation effect. The results here highlight the necessity of a MoS2/dielectric passivation strategy and provides a viable route for enhancing the performance of MoS2 nano-electronic devices.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Physics and Astronomy
Publisher: IOP Publishing: Hybrid Open Access
ISSN: 0268-1242
Date of First Compliant Deposit: 25 May 2018
Date of Acceptance: 15 December 2017
Last Modified: 29 May 2018 11:15
URI: http://orca.cf.ac.uk/id/eprint/111785

Actions (repository staff only)

Edit Item Edit Item

Downloads

Downloads per month over past year

View more statistics