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Fabrication of high-aspect-ratio, sub-micron gratings in AlGaInP/GaAs laser structures using a BCl3/Cl-2/Ar inductively coupled plasma

Edwards, Gareth, Sobiesierski, Angela, Westwood, David and Smowton, Peter 2007. Fabrication of high-aspect-ratio, sub-micron gratings in AlGaInP/GaAs laser structures using a BCl3/Cl-2/Ar inductively coupled plasma. Semiconductor Science and Technology 22 (9) , pp. 1010-1015. 10.1088/0268-1242/22/9/006

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Item Type: Article
Date Type: Publication
Status: Published
Schools: Physics and Astronomy
Subjects: Q Science > QC Physics
Uncontrolled Keywords: Surfaces ; Interfaces and thin films ; Optics ; Quantum optics and lasers ; Plasma physics ; Nanoscale science and low-D systems
Publisher: Institute of Physics
ISSN: 0268-1242
Last Modified: 04 Jun 2017 02:38
URI: http://orca.cf.ac.uk/id/eprint/11261

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