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Damage of functionalized self-assembly monomolecular layers applied to silicon microgear MEMS

Almuramady, Nabeel, Borodich, Feodor M., Goryacheva, Irina G. and Torskaya, Elena V. 2019. Damage of functionalized self-assembly monomolecular layers applied to silicon microgear MEMS. Tribology International 129 , pp. 202-213. 10.1016/j.triboint.2018.07.049
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Tooth surfaces of silicon-based MEMS microgears are described as smooth surfaces covered by adhesive asperities (nanoblocks). To reduce adhesive effects, the tooth surfaces are functionalized by OTS-SAM (Octadecyltrichlorosilane self-assembly monomolecular) carbon-based functionalized coatings. The wear of the coating is modelled using the modified Goryacheva-Torskaya model of damage accumulation. The amount of energy dissipated by different physical and chemical mechanisms along with energy dissipated by mechanical deformation of the counterparts is used to evaluate the frictional force. The main scenarios of wear process within the coating are described and discussed. The damage evolution is described for several levels of external load.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Engineering
Publisher: Elsevier
ISSN: 0301-679X
Date of First Compliant Deposit: 10 October 2018
Date of Acceptance: 31 July 2018
Last Modified: 12 Jun 2019 02:03

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