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Precision turning of optical mandrel with high steepness axisymmetric aspheric surface using arc-edged diamond cutter

Sun, Tao, Kong, Fanxing, Geng, Yanquan and Han, Quanquan 2017. Precision turning of optical mandrel with high steepness axisymmetric aspheric surface using arc-edged diamond cutter. International Journal of Advanced Manufacturing Technology 93 (9-12) , pp. 4243-4252. 10.1007/s00170-017-0872-2

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Abstract

It continues to be a challenge in machining the optical mandrel with high steepness axisymmetric aspheric surface due to the high machining cost. In this study, a novel approach which uses the arc-edged diamond cutter tangent to workpiece’s meridian profile curve at the interpolation points in “XZ” 2-axis machine tool is proposed. The mathematical model is established and the maximum of rough interpolation error that is generated using this method is also calculated. The number of rough interpolation segments and coordinates of the cutter center motion trajectory are determined when the maximum rough interpolation error is less than the allowable value of the given error. It analyzes the interpolation trajectory and interpolation error to determine the position and numerical value with the maximum rough interpolation error, as well as the correlation between the interpolation error and the number of interpolation points. The experimental results show that this method could generate smaller dimensional and form error compared to traditional 2-axis contouring approach method. In addition, compared to using multi-axis ultraprecision computer numerically controlled (CNC) lathe with the B-axis, processing of high steepness aspheric in “XZ” 2-axis lathe greatly reduces the cost. This method can thus be used for precision turning of Wolter type-I extreme ultraviolet (EUV) replication mandrel with high steepness aspheric surface.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Engineering
Publisher: Springer Verlag
ISSN: 0268-3768
Date of Acceptance: 24 July 2017
Last Modified: 11 Mar 2019 11:46
URI: http://orca.cf.ac.uk/id/eprint/120481

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