Fabrication of antenna-coupled KID array for cosmic microwave background detection

Tang, Q. Y., Barry, P. S., Basu Thakur, R., Kofman, A., Nadolski, A., Vieira, J. and Shirokoff, E. 2018. Fabrication of antenna-coupled KID array for cosmic microwave background detection. Journal of Low Temperature Physics 193 (3-4) , 149–156. 10.1007/s10909-018-1941-0

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Abstract

Kinetic inductance detectors (KIDs) have become an attractive alternative to traditional bolometers in the sub-mm and mm observing community due to their innate frequency multiplexing capabilities and simple lithographic processes. These advantages make KIDs a viable option for the O(500,000) detectors needed for the upcoming Cosmic Microwave Background-Stage 4 experiment. We have fabricated an antenna-coupled MKID array in the 150 GHz band optimized for CMB detection. Our design uses a twin-slot antenna coupled to an inverted microstrip made from a superconducting Nb/Al bilayer as the strip, a Nb ground plane and a SiNx dielectric layer in between, which is then coupled to an Al KID grown on high-resistivity Si. We present the fabrication process and measurements of SiNx microstrip resonators.

Item Type:	Article
Date Type:	Publication
Status:	Published
Schools:	Physics and Astronomy
Publisher:	Springer
ISSN:	1573-7357
Date of Acceptance:	20 April 2018
Last Modified:	02 May 2023 14:30
URI:	https://orca.cardiff.ac.uk/id/eprint/155710

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