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Patterning of nanomembranes with a focused-ion-beam

Matovic, J., Kettle, J., Brousseau, Emmanuel Bruno Jean Paul and Adamovic, N. 2008. Patterning of nanomembranes with a focused-ion-beam. Presented at: 26th International Conference on Microelectronics( MIEL 2008), Nis, Serbia, pp. 103-106.

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Item Type: Conference or Workshop Item (Paper)
Schools: Engineering
Centre for Advanced Manufacturing Systems At Cardiff (CAMSAC)
Last Modified: 04 Jun 2017 03:06

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