Cardiff University | Prifysgol Caerdydd ORCA
Online Research @ Cardiff 
WelshClear Cookie - decide language by browser settings

Static and dynamic determination of the mechanical properties of nanocrystalline diamond micromachined structures

Sillero, E., Williams, Oliver Aneurin, Lebedev, V., Cimalla, V., Röhlig, C.-C., Nebel, C. E. and Calle, F. 2009. Static and dynamic determination of the mechanical properties of nanocrystalline diamond micromachined structures. Journal of Micromechanics and Microengineering 19 (11) , 115016. 10.1088/0960-1317/19/11/115016

Full text not available from this repository.

Abstract

We present the static and dynamic mechanical characterization of several nanocrystalline diamond (NCD) freestanding micromachined structures. NCD films, fabricated by microwave plasma chemical vapour deposition on silicon (1 0 0), were underetched in order to release the test structures. Two different techniques are combined for the mechanical characterization, atomic force microscopy (AFM) and magnetomotive resonant frequency spectroscopy. The static Young's modulus (E) of the micromachined structures was calculated from the AFM measurements, resulting in E = 947 ± 40 GPa. This value is in excellent agreement with the determination of an acoustic velocity of 17 283 ± 232 m s−1, calculated from the resonance frequency of double-clamped structures and coupled single-clamped U-frame resonators.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Physics and Astronomy
Subjects: Q Science > QC Physics
Uncontrolled Keywords: Electronics and devices; Surfaces, interfaces and thin films; Nanoscale science and low-D systems
Publisher: Institute of Physics
ISSN: 0960-1317
Last Modified: 04 Jun 2017 03:12
URI: http://orca.cf.ac.uk/id/eprint/18066

Citation Data

Cited 8 times in Google Scholar. View in Google Scholar

Cited 10 times in Scopus. View in Scopus. Powered By Scopus® Data

Actions (repository staff only)

Edit Item Edit Item