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Master tool fabrication for the replication of micro and nano features

Hirshy, Hassan, Lalev, Georgi Maximov, Velkova, Valentina, Popov, Krastimir Borisov, Scholz, Steffen Gerhard and Dimov, Stefan Simeonov 2011. Master tool fabrication for the replication of micro and nano features. Presented at: 8th International Conference on Multi-Material Micro Manufacture, Suttgart, Germany, 8–10 November 2011. Published in: Kück, Heinz, Reinecke, Holger and Dimov, Stefan Simeonov eds. Proceedings of the 8th International Conference on Multi-Material Micro Manufacture, Suttgart, Germany, 8–10 November 2011. Singapore: Research Publishing, pp. 317-320. 10.3850/978-981-07-0319-6_215

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Abstract

A novel process chain for master tool fabrication for the replication of micro and nano features is presented in this paper. The proposed process flow relies on using complementary direct write and replication technologies for micro- and nano-structuring over relatively large areas. Results are presented when the process chain is implemented for the production of 5”x5” Ni shims of 2.5D topography of different test structures incorporating different feature sizes.

Item Type: Conference or Workshop Item (Paper)
Date Type: Publication
Status: Published
Schools: Engineering
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Uncontrolled Keywords: Process chain; FIB; Tool manufacture; UV-NIL; Electroforming; Ni-shim
Publisher: Research Publishing
ISBN: 9789810703202
Last Modified: 09 May 2019 20:54
URI: http://orca.cf.ac.uk/id/eprint/33768

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