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Nanocrystalline diamond-based field-effect capacitive pH sensor

Christiaens, P., Abouzar, M. H., Poghossian, A., Wagner, T., Bijnens, N., Williams, Oliver Aneurin, Daenen, M., Haenen, K., Schoning, M. J. and Wagner, P. 2007. Nanocrystalline diamond-based field-effect capacitive pH sensor. Presented at: TRANSDUCERS '07 & EUROSENSORS XXI: International Solid-State Sensors, Actuators and Microsystems Conference 2007, Lyon, France, 10-14 June 2007. Proceedings: TRANSDUCERS 2007: International Solid-State Sensors, Actuators and Microsystems Conference 2007. Los Alamitos, CA: IEEE, pp. 1891-1894. 10.1109/SENSOR.2007.4300527

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Abstract

The pH-sensitive properties of field-effect capacitive electrolyte-diamond-insulator- semiconductor (EDIS) sensors with undoped nanocrystalline diamond (NCD) thin films (100-500 nm) having hydrogen (H)- and oxygen (O)-terminated surfaces have been investigated. The NCD films were grown on p-Si-SiO2 substrates by a microwave plasma-enhanced chemical vapour deposition from a mixture of methane and hydrogen. The EDIS sensors have been characterised by means of capacitance- voltage spectroscopy, constant-capacitance and impedance-spectroscopy method. The developed EDIS sensors with O-terminated and H-terminated NCD surfaces show an average pH sensitivity of 38 mV/pH and 34-36 mV/pH, respectively. A possible mechanism of the pH sensitivity is discussed.

Item Type: Conference or Workshop Item (Paper)
Date Type: Publication
Status: Published
Schools: Physics and Astronomy
Subjects: Q Science > QC Physics
Publisher: IEEE
ISBN: 1424408423
Last Modified: 04 Jun 2017 04:11
URI: http://orca.cf.ac.uk/id/eprint/34170

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