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Atomic hydrogen cleaning, nitriding and annealing InSb (100)

Haworth, L., Lu, J., Westwood, David and Macdonald, John Emyr 2000. Atomic hydrogen cleaning, nitriding and annealing InSb (100). Applied Surface Science 166 (1-4) , pp. 253-258. 10.1016/S0169-4332(00)00425-6

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Abstract

Hydrogen cleaning and nitridation of InSb (100) using radio frequency (r.f.)-generated radicals was investigated using reflection high energy electron diffraction (RHEED), X-ray photoelectron spectroscopy (XPS) and atomic force microscopy (AFM). Hydrogen cleaning was found to remove antimony oxide and carbon contamination even at room temperature (RT) by creating volatile species but did not remove the indium oxide. Hydrogen cleaning at 275°C gave a clean, flat surface which showed a (4×2) In-rich reconstruction, while hydrogen cleaning at temperatures above the maximum congruent temperature of ∼325°C resulted in a surface with a step-terrace structure accompanied by large islands and deep pits. By annealing to 375°C a surface cleaned at 275°C, a surface with a step-terrace structure but no pit or island defects could be obtained. Similar behaviour was observed for nitrided rather than oxidised surfaces.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Physics and Astronomy
Subjects: Q Science > QC Physics
Uncontrolled Keywords: InSb; Atomic hydrogen cleaning; Nitridation; AFM; RHEED
Publisher: Elsevier
ISSN: 0169-4332
Last Modified: 04 Jun 2017 04:52
URI: http://orca.cf.ac.uk/id/eprint/45815

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