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Composite infrared bolometers with Si_3N_4 micromesh absorbers

Mauskopf, Philip Daniel, Bock, J. J., Del Castillo, H., Holzapfel, W. L. and Lange, A. E. 1997. Composite infrared bolometers with Si_3N_4 micromesh absorbers. Applied Optics 36 (4) , p. 765. 10.1364/AO.36.000765

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We report the design and performance of 300-mK composite bolometers that use micromesh absorbers and support structures patterned from thin films of low-stress silicon nitride. The small geometrical filling factor of the micromesh absorber provides 20× reduction in heat capacity and cosmic ray cross section relative to a solid absorber with no loss in IR-absorption efficiency. The support structure is mechanically robust and has a thermal conductance, G < 2 × 10−11 W/K, which is four times smaller than previously achieved at 300 mK. The temperature rise of the bolometer is measured with a neutron transmutation doped germanium thermistor attached to the absorbing mesh. The dispersion in electrical and thermal parameters of a sample of 12 bolometers optimized for the Sunyaev–Zel’dovich Infrared Experiment is ±7% in R (T), ±5% in optical efficiency, and ±4% in G.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Physics and Astronomy
Subjects: Q Science > QB Astronomy
Publisher: OSA
ISSN: 0003-6935
Last Modified: 23 Jan 2020 04:01

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