Study of silicon tip wear during AFM probe-based machining of single crystal copper

Mukhtar, Nur Farah Hafizah, Brousseau, Emmanuel Bruno Jean Paul and Prickett, Paul William 2014. Study of silicon tip wear during AFM probe-based machining of single crystal copper. Presented at: Ninth International Conference on MicroManufacturing (ICOMM 2014), Nanyang Technological University (NTU) and National University of Singapore (NUS), Singapore, 25-28 March 2014.

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Item Type:	Conference or Workshop Item (Paper)
Date Type:	Completion
Status:	Unpublished
Schools:	Centre for Advanced Manufacturing Systems At Cardiff (CAMSAC) Engineering
Subjects:	T Technology > TA Engineering (General). Civil engineering (General)
Related URLs:	Organisation
Last Modified:	11 Dec 2020 02:46
URI:	http://orca.cf.ac.uk/id/eprint/59798

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