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MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films

Sumant, Anirudha V., Auciello, Orlando, Liao, Meiyong and Williams, Oliver Aneurin 2014. MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films. MRS Bulletin- Materials Research Society 39 (6) , pp. 511-516. 10.1557/mrs.2014.98

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Abstract

Diamond, because of its unique physical, chemical, and electrical properties and the feasibility of growing it in thin-fi lm form, is an ideal choice as a material for the fabrication of reliable, long endurance, microelectromechanical/nanoelectromechanical systems (MEMS/NEMS). However, various practical challenges, including wafer-scale thickness uniformity, CMOS compatibility, surface micromachining, and, more importantly, controlling the internal stress of the diamond fi lms, make this material more challenging for MEMS engineers. Recent advances in the growth of diamond fi lms using chemical vapor deposition have changed this landscape since most technical hurdles have been overcome, enabling a new era of diamond based MEMS and NEMS development. This article discusses a few examples of MEMS and NEMS devices that have been fabricated using mono-, nano-, and ultrananocrystalline diamond films as well as their performance.

Item Type: Article
Date Type: Published Online
Status: Published
Schools: Physics and Astronomy
Subjects: Q Science > QC Physics
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Uncontrolled Keywords: Chemical vapor deposition (CVD) (chemical reaction); nanostructure; internal friction; microelectro-mechanical (MEMS); electronic material.
Additional Information: Pdf uploaded with 12 month restriction in accordance with publisher's policy at http://www.sherpa.ac.uk/romeo/issn/0883-7694/ (accessed 20/06/14).
Publisher: Materials Research Society
ISSN: 0883-7694
Date of First Compliant Deposit: 30 March 2016
Last Modified: 18 Feb 2019 16:05
URI: http://orca.cf.ac.uk/id/eprint/60572

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Cited 3 times in Google Scholar. View in Google Scholar

Cited 19 times in Scopus. View in Scopus. Powered By Scopus® Data

Cited 5 times in Web of Science. View in Web of Science.

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