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Calibration of a white light interferometer for the measurement of micro-scale dimensions

Ferri, C., Faraway, J. and Brousseau, Emmanuel Bruno Jean Paul 2010. Calibration of a white light interferometer for the measurement of micro-scale dimensions. International Journal of Advanced Manufacturing Technology 47 (1-4) , pp. 125-135. 10.1007/s00170-009-2050-7

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Item Type: Article
Date Type: Publication
Status: Published
Schools: Engineering
Centre for Advanced Manufacturing Systems At Cardiff (CAMSAC)
Publisher: Springer Verlag
ISSN: 0268-3768
Funders: EPSRC
Last Modified: 04 Jun 2017 02:01
URI: http://orca.cf.ac.uk/id/eprint/7735

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