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In plane anisotropy and stress detection of films deposited by RC technique

Meydan, Turgut and Kockar, H. 2001. In plane anisotropy and stress detection of films deposited by RC technique. European Physical Journal 24 (4) , pp. 457-461. 10.1007/s10051-001-8698-x

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Item Type: Article
Schools: Engineering
ISSN: 1434-6036
Last Modified: 04 Jun 2017 02:02
URI: http://orca.cf.ac.uk/id/eprint/7949

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