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Novel patterning method for the electrochemical production of etched silicon

Shapley, J. D. L. and Barrow, David Anthony 2001. Novel patterning method for the electrochemical production of etched silicon. Thin Sold Films 388 (1-2) , pp. 134-137. 10.1016/S0040-6090(01)00823-9

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Item Type: Article
Schools: Engineering
ISSN: 0040-6090
Last Modified: 04 Jun 2017 02:03
URI: http://orca.cf.ac.uk/id/eprint/8099

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