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Packaging of bio-MEMS: strategies, technologies and applications

Velten, T., Ruf, H .H., Barrow, David Anthony, Lazarou, P., Jung, E., Malek, C.K., Richter, M., Kruckow, J. and Wackerle, M. 2005. Packaging of bio-MEMS: strategies, technologies and applications. IEEE Transactions on Integration and Packaging 28 (4) , pp. 533-546. 10.1109/TADVP.2005.858427

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Item Type: Article
Schools: Engineering
ISSN: 1521-3323
Last Modified: 04 Jun 2017 02:04
URI: http://orca.cf.ac.uk/id/eprint/8431

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