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Superconductivity in planarised nanocrystalline diamond films

Klemencic, Georgina, Mandal, Soumen, Werrell, Jessica M., Giblin, Sean R. and Williams, Oliver Aneurin 2017. Superconductivity in planarised nanocrystalline diamond films. Science and Technology of Advanced Materials 18 (1) , pp. 239-244. 10.1080/14686996.2017.1286223

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Abstract

Chemical vapour deposition (CVD) grown boron-doped nanocrystalline diamond (B-NCD) is an attractive material for the fabrication of high frequency superconducting nanoelectromechanical systems (NEMS) due to its high Young’s modulus. The as-grown films have a surface roughness that increases with film thickness due to the columnar growth mechanism. To reduce intrinsic losses in B-NCD NEMS it is crucial to correct for this surface roughness by polishing. In this paper, in contrast to conventional polishing, it is demonstrated that the root-mean-square (RMS) roughness of a 520 nm thick B-NCD film can be reduced by chemical mechanical polishing (CMP) from 44.0 nm to 1.5 nm in 14 hours without damaging the sample or introducing significant changes to the superconducting transition temperature,

Item Type: Article
Date Type: Published Online
Status: Published
Schools: Physics and Astronomy
Subjects: Q Science > QC Physics
Uncontrolled Keywords: Boron doped diamond, surface roughness, chemical mechanical polishing, chemical vapour deposition, superconductivity
Publisher: Institute of Physics
ISSN: 1468-6996
Funders: ERC
Date of First Compliant Deposit: 15 April 2017
Date of Acceptance: 20 January 2017
Last Modified: 26 May 2019 22:12
URI: http://orca.cf.ac.uk/id/eprint/99888

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