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Vella, Pierre C., Dimov, Stefan Simeonov, Brousseau, Emmanuel Bruno Jean Paul ORCID: https://orcid.org/0000-0003-2728-3189, Minev, Ekaterin, Dobrev, Todor, Petkov, Petko Vladev ORCID: https://orcid.org/0000-0003-2185-2651 and Velkova, Valentina 2011. Length scale integration: implementation of a new process chain for producing replication masters with micro and nano scale features. Presented at: 8th International Conference on Multi-Material Micro Manufacture, Stuttgart, Germany, 8–10 November 2011. Published in: Kück, Heinz, Reinecke, Holger and Dimov, Stefan Simeonov eds. Proceedings of the 8th International Conference on Multi-Material Micro Manufacture. Research Publishing, pp. 343-347. 10.3850/978-981-07-0319-6_223

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