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Nanocrystalline diamond piezoresistive sensor

Kulha, Pavel, Kromka, Alexander, Babchenko, Oleg, Vanecek, Milan, Husak, Miroslav, Williams, Oliver Aneurin and Haenen, Ken 2009. Nanocrystalline diamond piezoresistive sensor. Vacuum 84 (1) , pp. 53-56. 10.1016/j.vacuum.2009.04.023

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The design, fabrication and test of piezoresistive sensors based on nanocrystalline diamond (NCD) films are reported. The CoventorWare FEM calculations of the mechanical stress and geometrical deformations of a 3-D structure are used for a proper localization of the piezoresistor on the carrying substrate. The boron-doped piezoresistive sensing element was realized using a directed patterned growth of NCD film on SiO2/Si by microwave plasma-enhanced chemical vapour deposition (CVD). The gauge factor of boron-doped NCD films was investigated in the range from room temperature up to 200 °C and from 0 to 5 N of the applied force. These NCD piezoresistive sensor elements are compared with a Silicon-on-Insulator (SOI) based piezoresistive sensor and their high-temperature applications are discussed.

Item Type: Article
Date Type: Publication
Status: Published
Schools: Physics and Astronomy
Subjects: Q Science > QC Physics
Uncontrolled Keywords: Nanocrystalline diamond; Piezoresistivity; Strain sensor
Publisher: Elsevier
ISSN: 0042-207X
Last Modified: 04 Jun 2017 03:12

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